Chuang'an helps ensure production safety in the semiconductor industry
The manufacturing process of the semiconductor industry involves hundreds of electronic gases, which often have characteristics such as flammability, explosiveness, toxicity, corrosiveness, and suffocation. How to ensure gas safety?
With the explosive development of industries such as AI and humanoid robots, the semiconductor industry has enormous growth potential, and it is expected that its market size will exceed the $1 trillion mark by 2030.
The semiconductor industry is a strategic pillar industry based on semiconductor materials such as silicon, germanium, and gallium nitride, and is also a typical technology intensive and capital intensive industry. Its manufacturing process is complex, covering thousands of processes such as silicon wafer manufacturing, chip design, mask fabrication, chip manufacturing, packaging testing, etc. Downstream involves many application fields such as integrated circuits, display panels, medical and health, consumer electronics, lighting, communication, photovoltaics, and new energy vehicles.
Due to the continuous development of semiconductor wafer processes, the line width is becoming narrower, and the requirements for production processes are also increasing. These factors have put forward higher requirements for the continuous and fault free operation of various systems in semiconductor wafer factories, as well as the quality of the raw materials provided to the production process.
In the semiconductor manufacturing process, electronic gas is the second largest manufacturing material after silicon wafers, with over a hundred categories, known as the "blood of chips".
Electronic gases include two categories: electronic bulk gases and electronic specialty gases. Electronic bulk gases are the environmental gases, protective gases, and carriers used in the production and manufacturing process, while electronic specialty gases are mainly used in chip manufacturing processes such as photolithography, etching, film formation, cleaning, doping, and deposition.
At the same time, in the semiconductor production and manufacturing process, acidic exhaust gas, alkaline exhaust gas, organic exhaust gas, general exhaust gas and other gases may also be generated.
Electronic gases and exhaust gases are mostly flammable, explosive, toxic, harmful, corrosive, and suffocating gases, while semiconductor manufacturing workshops are mostly dust-free and enclosed environments equipped with return air systems. Once a dangerous gas leak occurs, even a very small leak may cause explosions, personnel suffocation, or poisoning accidents. Therefore, the issue of gas safety cannot be ignored and gas detection must be carried out.
Multiple countries around the world have mandated that special gas detection devices should be installed in the following areas or locations where special gases are stored, transported, and used:
① At the exhaust pipe openings of gas cylinder cabinets and valve boxes for self igniting, flammable, highly toxic, toxic, and corrosive gases;
② At the exhaust ports of valve boxes for self ignition, flammability, toxicity, toxicity, and corrosive gases in production process equipment, and at the exhaust ports of process equipment;
③ At the exhaust outlet of the special gas exhaust treatment device for production process equipment;
④ Areas where suffocation may occur between inert gases;
⑤ Equipment rooms containing self igniting, flammable, highly toxic, toxic, and corrosive gases;
⑥ Other environments where self ignition, flammability, toxicity, toxicity, and corrosive gases may leak.
In addition, the standard also provides relevant regulations on alarm settings, response time, installation location, etc.
CA228 is a product specifically designed to detect leaks of flammable, toxic, and harmful gases in semiconductor factories. It features high sensitivity, high reliability, and low concentration detection, and can detect hundreds of gases such as ammonia, arsine, chlorine, and silane. It is suitable for industries such as semiconductors, liquid crystal panels, photovoltaics, and battery manufacturing.
This product has been successfully applied in multiple semiconductor manufacturing factories and has received unanimous recognition from users.
In the post Moore era, the production process difficulty of the semiconductor industry continues to increase, and the production and manufacturing costs continue to rise. The cost of electronic specialty gases accounts for as much as 13%, and some high-end imported gases are very expensive, with prices reaching tens of thousands of yuan per kilogram. Gas leaks not only cause property losses, but also may cause work-related accidents. Chuang'an Company has profound technical accumulation and service experience in the field of toxic, harmful, flammable, and explosive gas safety monitoring. With the support of gas detectors in semiconductor factories, it will assist semiconductor enterprises in safe production, reduce costs, and increase efficiency.